Park, Jaehyun, Incheon National University (INU), Korea, Republic of
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International Journal of Industrial Engineering: Theory, Applications and Practice Vol. 23 No. 5 (2016) - Special Issue: 2015 International Symposium on Semiconductor Manufacturing Intelligence
OPTIMIZING MULTIPLE RESPONSE VARIABLES OF CHEMICAL AND MECHANICAL PLANARIZATION PROCESS FOR SEMICONDUCTOR FABRICATION USING A CLUSTERING METHOD
Abstract