Chien, Chen-Fu, Department of Industrial Engineering & Engineering Management, National Tsing Hua University, Taiwan, Taiwan, Province of China
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International Journal of Industrial Engineering: Theory, Applications and Practice Vol. 25 No. 6 (2018) - Manufacturing and Control
MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS
Abstract