A SCHEDULE OF CLEANING PROCESSES FOR A SINGLE-ARMED CLUSTER TOOL

Authors

  • Seung-Min Noh Graduate School of Public Policy and Information Technology, Seoul National University of Science and Technology Seoul, Korea
  • Ja-Hee Kim Graduate School of Public Policy and Information Technology, Seoul National University of Science and Technology Seoul, Korea http://orcid.org/0000-0002-6863-0821
  • Seong-Yong Jang Department of Industrial and Information Systems Engineering, Seoul National University of Science and Technology Seoul, Korea

DOI:

https://doi.org/10.23055/ijietap.2017.24.2.2911

Keywords:

cluster tool, preventive maintenance, theory of constraints, Petri-net, simulation

Abstract

Cluster tools have widely spread throughout most semiconductor fabrication processes over the decades. A conventional robot sequence of a single-armed cluster tool pursues a backward strategy for efficiency. However, we cannot guarantee that the strategy is optimal under some abnormal situations, such as breakdowns, and during auto-cleaning, also known as periodic cleaning for preventive maintenance. In this paper, we focus on auto-cleaning, which is undesirable but predictable. For auto-cleaning, we suggest alternative cleaning frequencies for time efficiency of a single-armed cluster tool that periodically cleans the inside of process modules. Additionally, we derive its heuristic robot scheduling from Petri-net models. Finally, we examine the effectiveness of our suggestions by simulation.

 

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Published

2017-09-12

How to Cite

Noh, S.-M., Kim, J.-H., & Jang, S.-Y. (2017). A SCHEDULE OF CLEANING PROCESSES FOR A SINGLE-ARMED CLUSTER TOOL. International Journal of Industrial Engineering: Theory, Applications and Practice, 24(2). https://doi.org/10.23055/ijietap.2017.24.2.2911

Issue

Vol. 24 No. 2 (2017): 2015 Asia Simulation Conference at Jeju, Korea

Section

Special Issue: Asia Simulation 2015

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