DISCRETE-EVENT SIMULATION FOR SEMICONDUCTOR WAFER FABRICATION FACILITIES: A TUTORIAL
DOI:
https://doi.org/10.23055/ijietap.2015.22.5.2276Keywords:
Discrete-event Simulation, Semiconductor Manufacturing, Modeling Issues, TutorialAbstract
Discrete-event simulation is a well-established and rather successful method in some semiconductor companies. while other companies do not use simulation at all. Simulation is used for performance assessment and decision-making. This paper focuses on the methodological and practical issues that have to be addressed to build, use, and maintain simulation models for a semiconductor wafer fabrication facility (wafer fab). We describe and discuss the main steps of a simulation study in this domain. We seek to highlight the main issues and present alternative ways to address them. Common pitfalls in using discrete-event simulation in semiconductor manufacturing and how they can be avoided are also discussed.Published
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