Noh S-M, Kim J-H, Jang S-Y. A SCHEDULE OF CLEANING PROCESSES FOR A SINGLE-ARMED CLUSTER TOOL. Int J Ind Eng [Internet]. 2017 Sep. 12 [cited 2024 May 16];24(2). Available from: https://journals.sfu.ca/ijietap/index.php/ijie/article/view/2911