Park, Jaehyun, and Dong-Hee Lee. “OPTIMIZING MULTIPLE RESPONSE VARIABLES OF CHEMICAL AND MECHANICAL PLANARIZATION PROCESS FOR SEMICONDUCTOR FABRICATION USING A CLUSTERING METHOD”. International Journal of Industrial Engineering: Theory, Applications and Practice 23, no. 5 (January 6, 2017). Accessed May 21, 2024. https://journals.sfu.ca/ijietap/index.php/ijie/article/view/2724.