[1]
M. Khakifirooz, M. Fathi, and C.-F. Chien, “MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS”, Int J Ind Eng, vol. 25, no. 6, Jan. 2019.