KHAKIFIROOZ, M.; FATHI, M.; CHIEN, C.-F. MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS. International Journal of Industrial Engineering: Theory, Applications and Practice, [S. l.], v. 25, n. 6, 2019. DOI: 10.23055/ijietap.2018.25.6.4871. Disponível em: https://journals.sfu.ca/ijietap/index.php/ijie/article/view/4871. Acesso em: 18 may. 2024.