NOH, S.-M.; KIM, J.-H.; JANG, S.-Y. A SCHEDULE OF CLEANING PROCESSES FOR A SINGLE-ARMED CLUSTER TOOL. International Journal of Industrial Engineering: Theory, Applications and Practice, [S. l.], v. 24, n. 2, 2017. DOI: 10.23055/ijietap.2017.24.2.2911. Disponível em: https://journals.sfu.ca/ijietap/index.php/ijie/article/view/2911. Acesso em: 16 may. 2024.