PARK, J.; LEE, D.-H. OPTIMIZING MULTIPLE RESPONSE VARIABLES OF CHEMICAL AND MECHANICAL PLANARIZATION PROCESS FOR SEMICONDUCTOR FABRICATION USING A CLUSTERING METHOD. International Journal of Industrial Engineering: Theory, Applications and Practice, [S. l.], v. 23, n. 5, 2017. DOI: 10.23055/ijietap.2016.23.5.2724. Disponível em: https://journals.sfu.ca/ijietap/index.php/ijie/article/view/2724. Acesso em: 21 may. 2024.